3 April 1989 Spatial Carrier Heterodyne Techniques For Precision Interferometry And Profilometry: An Overview
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Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961253
Event: Interferometry '89, 1989, Warsaw, Poland
Abstract
An overview is given on the principle and the recent development of the spatial-carrier fringe-pattern analysis techniques, and their application areas are introduced.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mitsuo Takeda, "Spatial Carrier Heterodyne Techniques For Precision Interferometry And Profilometry: An Overview", Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961253; https://doi.org/10.1117/12.961253
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