ZnO films deposited onto InP substrates by using sputtering has been studied. Several sputtering parameters including RF power, substrate temperature and oxygen content have been investigated to get a better ZnO thin films. The suitable ratio of oxygen and argon makes an important role in getting high guality films. 20% oxygen content is the best one for sputtered ZnO films. From SEM measurements and the etching patterns, a fine dense grain structure with a smooth interface and fine growth pattern can be obtained.
Yan K. Su,
Shi L. Chen,
"Effect Of RF Sputtering Parameters On ZnO Films Deposited Onto Inp Substrates", Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); doi: 10.1117/12.961351; https://doi.org/10.1117/12.961351