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8 January 1990 Investigation Of Wide-Range Stylus Profilometry
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Proceedings Volume 1125, Thin Films in Optics; (1990)
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France
Stylus profilometry plays an important part in characterising topography of substrates and films for x-ray optics, through such commercial instruments as the Rank Taylor Hobson Talystep and Form Talysurf. The Talystep, further developed as the Nanosurf by Lindsey and co-workers at the NPL, has 50pm vertical resolution and is well suited to the measurement of large flat substrates; however, its vertical range of 10 microns limits use on curved substrates. The Form Talysurf avoids this range limitation by use of an interferometric transducer but its vertical resolution of l0nm is inadequate for measurement of x-ray optical surfaces. We report an experimental investigation of the factors limiting the resolution of the Form Talysurf. It is shown that the limit can be reduced without modification to the interferometric transducer, and limits to accuracy from differential non-linearity of the transducer and the performance of the cantilever stylus arm are considered.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael A. Player and David M. Henry "Investigation Of Wide-Range Stylus Profilometry", Proc. SPIE 1125, Thin Films in Optics, (8 January 1990);

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