8 January 1990 PLZT Electro-Optical Thin Films For Integrated Optics
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Proceedings Volume 1125, Thin Films in Optics; (1990) https://doi.org/10.1117/12.961368
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France
Abstract
Many types of electro-optical thin films are under investigation. Among them PLZT thin film is an attractive material due to its large electro-optical effects. Oriented PLZT thin films have been prepared on sapphire and glass substrate by R.F. magnetron sputtering using a powder target. Some properties have been studied and preliminary results are promising for applications in a variety of optical processing and computing systems. In addition PLZT thin film has also been prepared for the first time by the metallo-organic decomposition method. This method can offer lower firing temperature to form PLZT phase.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. L. Ding, A. L. Ding, W. G. Luo, W. G. Luo, Y. R . Huang, Y. R . Huang, G. Dong, G. Dong, B. C. H. Steele, B. C. H. Steele, } "PLZT Electro-Optical Thin Films For Integrated Optics", Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); doi: 10.1117/12.961368; https://doi.org/10.1117/12.961368
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