Translator Disclaimer
Presentation + Paper
2 March 2020 Position observer based galvanometer scanner and XY stage synchronization for large area processing
Author Affiliations +
Abstract
In this paper we present a novel sub-system for synchronizing motion of the galvanometer-based scanner and the XY stage system using a compact single controller that is independent of XY stage type or manufacturer. This integration directly utilizes the stage’s encoder output to compensate its motion in real time. Better than 10μm accuracy is demonstrated with various application patterns.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Keith J. Dowling, Bhavesh A. Bhut, Mark S. Lucas, Seethram Sivam, Yu John Hsu, Amit Shahar, and Jin Li "Position observer based galvanometer scanner and XY stage synchronization for large area processing", Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 1126713 (2 March 2020); https://doi.org/10.1117/12.2546482
PROCEEDINGS
9 PAGES + PRESENTATION

SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top