Translator Disclaimer
Presentation + Paper
2 March 2020 Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses
Author Affiliations +
Abstract
We present a new fabrication method to realize smooth structures in lithium niobate. Therefore a detailed study on laser micro-polishing using ultrashort laser pulses is carried out by separating the effects of spatial pulse overlap and temporal pulse overlap. The adventage of this approach is the smoothing of the processed area by a simultaneous ablation. That will allow ablation depths between 1 µm and 4 µm with rms-roughness values of ≈20 nm.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mareike Schäfer and Johannes L'huillier "Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses", Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 112680R (2 March 2020); https://doi.org/10.1117/12.2546493
PROCEEDINGS
7 PAGES + PRESENTATION

SHARE
Advertisement
Advertisement
KEYWORDS
Pulsed laser operation

Lithium niobate

Laser ablation

Surface finishing

Laser processing

Gaussian beams

Polishing

RELATED CONTENT

Engineering model for ultrafast laser microprocessing
Proceedings of SPIE (March 09 2016)
Laser polishing using ultrashort pulse laser
Proceedings of SPIE (March 02 2020)
Laser polishing
Proceedings of SPIE (February 15 2012)
Laser ablation of the thin film by thermal tension
Proceedings of SPIE (June 26 2001)

Back to Top