Internal micro structuring of transparent optical polymers by fs laser

Gian-Luca Roth; Cemal Esen; Ralf Hellmann

doi:10.1117/12.2543487

2 March 2020 Internal micro structuring of transparent optical polymers by fs laser

Gian-Luca Roth, Cemal Esen, Ralf Hellmann

Proceedings Volume 11268, Laser-based Micro- and Nanoprocessing XIV; 112681L (2020) https://doi.org/10.1117/12.2543487
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

Lab-on-chip systems are based on components to transport, mix, separate and analyse small volumes of different fluids. The consecutive integration of more complex functions into a single and compact chip demands on multilayer systems. As the classical production using a stacking and joining of single processed layers is elaborate and limited in terms of multilayer structures, an uprising trend to fabricate those devices is the internal, three dimensional processing of transparent substrates by using ultrashort laser pulses. In this study, we report on the generation of internal hollow architectures created by focused 514nm femtosecond laser pulses inside optical polymer bulk materials of different polymers. The three-dimensional channel layout is implemented by moving the sample using three-dimensional motorized stages, allowing arbitrary complex shaped internal channel architectures. Size and cross sectional shape of a single internal generated microchannel are determined by the intensity distribution of the focal voxel. In particular, we show a comprehensive parameter study to improve this laser process with respect to a higher processing speed and stability.

Citation Download Citation

Gian-Luca Roth, Cemal Esen, and Ralf Hellmann "Internal micro structuring of transparent optical polymers by fs laser", Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 112681L (2 March 2020); https://doi.org/10.1117/12.2543487

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