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2 March 2020 Simulation of terahertz waves in multilayer coatings for non-contact thickness measurements of top layers
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Abstract
This work addresses simulations of terahertz waves for the determination of layer thicknesses, in particular to analyze the top layers of multilayer coatings. For such analyses, a relatively short measuring time window is possible, which leads to time savings. However, not every simulation method takes time limitations of measuring windows into account. Therefore, we compare different simulation methods and adapt one of them to our application.
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Imke Busboom, Simon Christmann, Hartmut Haehnel, Volker K. S. Feige, and Bernd Tibken "Simulation of terahertz waves in multilayer coatings for non-contact thickness measurements of top layers", Proc. SPIE 11279, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIII, 112790J (2 March 2020); https://doi.org/10.1117/12.2541298
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