21 December 1989 Lixiviation Effects In Glass Polishing
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Proceedings Volume 1128, Glasses for Optoelectronics; (1989) https://doi.org/10.1117/12.961434
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France
From our glass polishing process of precision optics we know that its physical-chemical nature frequently leads to a complex interaction of several parameters determining the process and the resulting quality. Surface analysis using SIMS and WDX prove that surface and sharp edge polishing of integrated optics chips has to be watched critically in order to obtain useful parts in a reproducible manner.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Holger Fiedler, K. Holger Fiedler, } "Lixiviation Effects In Glass Polishing", Proc. SPIE 1128, Glasses for Optoelectronics, (21 December 1989); doi: 10.1117/12.961434; https://doi.org/10.1117/12.961434

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