HVPE growth of [beta]-Ga2O3 films for devices on bulk and thermally enhanced [beta]-Ga2O3 composite substrates (Conference Presentation)

Jacob H. Leach; T. Hess; H. Splawn; Sukwon Choi; Craig McGray

doi:10.1117/12.2556295

27 March 2020 HVPE growth of β-Ga₂O₃ films for devices on bulk and thermally enhanced β-Ga₂O₃ composite substrates (Conference Presentation)

Jacob H. Leach, T. Hess, H. Splawn, Sukwon Choi, Craig McGray

Author Affiliations +

Proceedings Volume 11281, Oxide-based Materials and Devices XI; 112810F (2020) https://doi.org/10.1117/12.2556295
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

"HVPE growth of [beta]-Ga2O3 films for devices on bulk and thermally enhanced [beta]-Ga2O3 composite substrates" was recorded at Photonics West 2020 in San Francisco, California.

Conference Presentation

Citation Download Citation

Jacob H. Leach, T. Hess, H. Splawn, Sukwon Choi, and Craig McGray "HVPE growth of β-Ga₂O₃ films for devices on bulk and thermally enhanced β-Ga₂O₃ composite substrates (Conference Presentation)", Proc. SPIE 11281, Oxide-based Materials and Devices XI, 112810F (27 March 2020); https://doi.org/10.1117/12.2556295

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