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10 March 2020 High-precision local transfer of van der Waals materials on nanophotonic structures (Conference Presentation)
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Proceedings Volume 11282, 2D Photonic Materials and Devices III; 112820I (2020) https://doi.org/10.1117/12.2543902
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
Prototyping of van der Waals materials on dense nanophotonic devices requires high-precision monolayer discrimination to avoid bulk material contamination. We use the glass transition temperature of polycarbonate, used in the standard dry transfer process, to draw an in situ point for the precise pickup of two dimensional materials. We transfer transition metal dichalcogenide monolayers onto a large-area silicon nitride spiral waveguide and silicon nitride ring resonators to demonstrate the high-precision contamination-free nature of the modified dry transfer method.
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© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Rosser "High-precision local transfer of van der Waals materials on nanophotonic structures (Conference Presentation)", Proc. SPIE 11282, 2D Photonic Materials and Devices III, 112820I (10 March 2020); https://doi.org/10.1117/12.2543902
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