Impact of vibrations and reflector movements on the measurement uncertainty of Fourier-based frequency sweeping interferometry

M. Sosin; H. Mainaud Durand; V. Rude; J. Rutkowski

doi:10.1117/12.2560998

2 March 2020 Impact of vibrations and reflector movements on the measurement uncertainty of Fourier-based frequency sweeping interferometry

M. Sosin, H. Mainaud Durand, V. Rude, J. Rutkowski

Author Affiliations +

Proceedings Volume 11287, Photonic Instrumentation Engineering VII; 112871L (2020) https://doi.org/10.1117/12.2560998
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Engineers and more specifically surveyors frequently choose optical interferometry techniques for high precision metrology applications, as they offer a very good resolution and traceability of the measured distances. Nowadays, multiple interferometric solutions and interferometer configurations are available on the market. Part of them, typically single wavelength ones, offer a relative displacement measurement capability, with the advantage of a very high (even picometre) resolution, but are impractical in applications where distance tracking is needed after the reboot of the interferometer unit. Other solutions are absolute interferometers, usually based on Frequency Sweeping Interferometry (FSI), which offer true distance measurement. For such solutions, the measurement accuracy is worse than for relative ones and is of the order of the micrometer, mainly due to vibrations causing an optical path length change during the laser scan. At CERN, a range of new alignment solutions using Fourier based FSI is under development and qualification. This FSI technique allows the simultaneous measurements of absolute distances to multiple targets and is less sensitive to variations of intensity from the reflected optical signal, hence predisposing it for the harsh environment of accelerators. One advantage of this measuring technique is its simplicity to distribute hundreds channels over large-scale alignment installations. Its main disadvantage comes from potential variations of distance during the laser sweep. Such variations are typically caused by vibration or displacements of the reflector.
Multiple tests were performed to characterize the impact of reflective target vibration on the measurement uncertainty of Fourier-based FSI solutions. This paper describes the results of these tests and the lessons learnt.

Citation Download Citation

M. Sosin, H. Mainaud Durand, V. Rude, and J. Rutkowski "Impact of vibrations and reflector movements on the measurement uncertainty of Fourier-based frequency sweeping interferometry", Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112871L (2 March 2020); https://doi.org/10.1117/12.2560998

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