Nanostructured trampoline microcavities for sensing and optomechanics

Aurélien Dantan

doi:10.1117/12.2542106

26 February 2020 Nanostructured trampoline microcavities for sensing and optomechanics

Aurélien Dantan

Proceedings Volume 11290, High Contrast Metastructures IX; 112901M (2020) https://doi.org/10.1117/12.2542106
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Microcavities using high mechanical quality suspended thin films as flexible mirrors can be exquisitely sensitive to gas or radiation pressure changes. We demonstrate how to directly pattern thin (200 nm), suspended silicon nitride membranes with subwavelength gratings in order to enhance their reflectivity. We discuss how using such nanostructured trampolines to form ultrashort microcavities may lead to a combination of small modevolume and remarkably narrow linewidth which is interesting for improving the sensitivity of optical sensors or for cavity optomechanics. Using high mechanical quality nanotrampolines to form few-micron long sandwiches we realize squeeze film pressure sensors in which the modifications of their vibrations due to the compression of the gas between them are measured optically and whose state-of-the-art responsitivity and sensitivity are promising for absolute pressure measurements in the free molecular flow regime.

Conference Presentation

Citation Download Citation

Aurélien Dantan "Nanostructured trampoline microcavities for sensing and optomechanics", Proc. SPIE 11290, High Contrast Metastructures IX, 112901M (26 February 2020); https://doi.org/10.1117/12.2542106

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