26 October 1989 Removal Process Of Ceramic Materials With Excimer Laser Radiation
Author Affiliations +
Proceedings Volume 1132, High Power Lasers and Laser Machining Technology; (1989) https://doi.org/10.1117/12.961569
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France
Abstract
Because of its specific features, shortest pulses with highest pulse power, excimer laser radiation seems to be suitable for processing ceramics. It reveals high surface quality and enables a 2- or 3-dimensional structuring in the field of micro machining. This paper deals with the interaction process between ceramic materials and excimer laser radiation. The effect of different beam parameters on the removal result and the laser affected zone respectively and further capabiltities of material processing with UV-radiation for various industrial applications are discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. K. Tonshoff, H. K. Tonshoff, O. Gedrat, O. Gedrat, } "Removal Process Of Ceramic Materials With Excimer Laser Radiation", Proc. SPIE 1132, High Power Lasers and Laser Machining Technology, (26 October 1989); doi: 10.1117/12.961569; https://doi.org/10.1117/12.961569
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT

High power DUV lasers for material processing
Proceedings of SPIE (November 08 2016)
Advanced Concepts In Laser Material Processing In Europe
Proceedings of SPIE (August 04 1986)
The physics in applications of ultrafast lasers
Proceedings of SPIE (October 11 2011)
Micromachining with DUV lasers
Proceedings of SPIE (April 01 1997)
Deep drilling of metals by femtosecond laser pulses
Proceedings of SPIE (September 12 2002)
Surface structuring of metals with ultrashort laser pulses
Proceedings of SPIE (February 18 2003)

Back to Top