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11 December 2019 A new excimer lamp model of Institute of High Current Electronics
Victor F Tarasenko, Sergey M. Avdeev, Victor A. Panarin, Victor S. Skakun, Eduard A. Sosnin
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Proceedings Volume 11322, XIV International Conference on Pulsed Lasers and Laser Applications; 1132227 (2019) https://doi.org/10.1117/12.2541530
Event: XIV International Conference on Pulsed Lasers and Laser Applications (AMPL-2019), 2019, Tomsk, Russian Federation
Abstract
A new models of Xe2-excilamp (with maximum of radiation spectra at 172 nm) developed in Optical Radiation Laboratory of High Current Electronics Institute are presented. The task of creating a lamp with the most simple design embodiment was solved. The bulb of such an excilamp was made from a single quartz tube with a diameter of 22 mm and a length of 12 cm. The length of the discharge region was 4 cm. The lamp was supplied with voltage pulses from a generator of 2 μs with a repetition frequency up to 100 kHz. A radiant exitance of 3.5 mW/cm2 has been obtained. This value has not changed after 2400 hours of excilamp operation. The report will also describe other designs of Xe2-excilamps.
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Victor F Tarasenko, Sergey M. Avdeev, Victor A. Panarin, Victor S. Skakun, and Eduard A. Sosnin "A new excimer lamp model of Institute of High Current Electronics", Proc. SPIE 11322, XIV International Conference on Pulsed Lasers and Laser Applications, 1132227 (11 December 2019); https://doi.org/10.1117/12.2541530
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KEYWORDS
Quartz
Lamps
Xenon
Excimers
Vacuum ultraviolet
Light sources
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