Determination of secondary electron attenuation length to characterize electron blur (Conference Presentation)

Oleg Kostko; Jonathan Ma; Patrick Naulleau

doi:10.1117/12.2553704

24 March 2020 Determination of secondary electron attenuation length to characterize electron blur (Conference Presentation)

Oleg Kostko, Jonathan Ma, Patrick Naulleau

Author Affiliations +

Proceedings Volume 11323, Extreme Ultraviolet (EUV) Lithography XI; 113231D (2020) https://doi.org/10.1117/12.2553704
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

EUV photon absorption by a resist film leads to emission of a photoelectron and several low kinetic energy secondary electrons. The “universal curve”, used in X-ray photoelectron spectroscopy, suggests that the low kinetic energy electrons may travel tens to hundreds of nanometers in solids until they inelastically scatter. The fact that electrons travel long distances before they may initiate chemical reactions ultimately result in blur of the aerial image, reducing the contrast and subsequently resolution of the resist. In this work, we will present an experimental approach to determine secondary electron attenuation length (EAL) – the thickness of resist material required to reduce number of emitted secondary electrons to 1/e of initial. The EAL describes how far secondary electrons can travel in a resist film and is directly related to the electron blur. Possibilities to gain additional information on electron penetration depth in resist films will also be discussed.

Conference Presentation

Citation Download Citation

Oleg Kostko, Jonathan Ma, and Patrick Naulleau "Determination of secondary electron attenuation length to characterize electron blur (Conference Presentation)", Proc. SPIE 11323, Extreme Ultraviolet (EUV) Lithography XI, 113231D (24 March 2020); https://doi.org/10.1117/12.2553704

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available