Author Affiliations +
Vidyasagar Anantha,1 Raghav Babulnath,1 Veikunth Kannan,2 Garima Sharma,2 Shubham Kumar,2 Kaushik Sah,3 Andrew Cross,4 Rahul Lakhawat,2 Hari Pathangi,2 Peter De Bisschop5
1KLA Corp. (United States)
2KLA Corp. (India)
3KLA Corp. (Belgium)
4KLA Corp. (United Kingdom)
5IMEC (Belgium)