Atom probe tomography using extreme-ultraviolet light

Luis Miaja-Avila; Ann N. Chiaramonti; Benjamin W. Caplins; David R. Diercks; Brian P. Gorman; Norman A. Sanford

doi:10.1117/12.2551898

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20 March 2020 Atom probe tomography using extreme-ultraviolet light

Luis Miaja-Avila, Ann N. Chiaramonti, Benjamin W. Caplins, David R. Diercks, Brian P. Gorman, Norman A. Sanford

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Proceedings Volume 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV; 113250A (2020) https://doi.org/10.1117/12.2551898
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

We present a different approach to laser-assisted atom probe tomography, where instead of using a near-UV laser for inducing a thermal transient, we use an extreme-ultraviolet coherent light source to trigger field ion emission at the tip's apex. The use of extreme-ultraviolet photons in atom probe tomography opens the potential for an athermalfield ionization pathway.

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Luis Miaja-Avila, Ann N. Chiaramonti, Benjamin W. Caplins, David R. Diercks, Brian P. Gorman, and Norman A. Sanford "Atom probe tomography using extreme-ultraviolet light", Proc. SPIE 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV, 113250A (20 March 2020); https://doi.org/10.1117/12.2551898

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