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20 March 2020 Atom probe tomography using extreme-ultraviolet light
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Abstract
We present a different approach to laser-assisted atom probe tomography, where instead of using a near-UV laser for inducing a thermal transient, we use an extreme-ultraviolet coherent light source to trigger field ion emission at the tip's apex. The use of extreme-ultraviolet photons in atom probe tomography opens the potential for an athermalfield ionization pathway.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luis Miaja-Avila, Ann N. Chiaramonti, Benjamin W. Caplins, David R. Diercks, Brian P. Gorman, and Norman A. Sanford "Atom probe tomography using extreme-ultraviolet light", Proc. SPIE 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV, 113250A (20 March 2020); https://doi.org/10.1117/12.2551898
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