On product overlay metrology challenges in advanced nodes

Andrei Shchegrov; Philippe Leray; Yuri Paskover; Liran Yerushalmi; Efi Megged; Yoav Grauer; Roel Gronheid

doi:10.1117/12.2551932

20 March 2020 On product overlay metrology challenges in advanced nodes

Andrei Shchegrov, Philippe Leray, Yuri Paskover, Liran Yerushalmi, Efi Megged, Yoav Grauer, Roel Gronheid

Proceedings Volume 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV; 113251P (2020) https://doi.org/10.1117/12.2551932
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

On product overlay (OPO) challenges are quickly becoming yield limiters for the latest technology nodes, requiring new and innovative metrology solutions. In this paper we will cover current and future overlay trends in logic and memory device processing. We will review new lithography overlay challenges and node-after-node trends in the OPO error budget for advanced logic, DRAM, and 3D NAND devices. The central question of this paper is whether optical overlay metrology can keep up with challenges that include accuracy, intra-field variability, target-to-device offset, and others. After surveying the two dominant technologies in optical overlay metrology (IBO and SCOL^®), we will outline innovative solutions that will help to address metrology challenges for the new device nodes.

Conference Presentation

Citation Download Citation

Andrei Shchegrov, Philippe Leray, Yuri Paskover, Liran Yerushalmi, Efi Megged, Yoav Grauer, and Roel Gronheid "On product overlay metrology challenges in advanced nodes", Proc. SPIE 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV, 113251P (20 March 2020); https://doi.org/10.1117/12.2551932

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available