Research on the development status of surface inspection technology

Zhencong Wu; Yufang Chen; Min Wang

doi:10.1117/12.2542992

18 December 2019 Research on the development status of surface inspection technology

Zhencong Wu, Yufang Chen, Min Wang

Proceedings Volume 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications; 113340J (2019) https://doi.org/10.1117/12.2542992
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

This paper combines the research of laboratory topics, through reading a large number of related literatures, and tracking the latest technology of interferometer companies at home and abroad, analyzing and contrasting the two mainstream optical path modes of interferometer: Twyman Green and Fizeau Optical Road. To sum up their pros and cons; at present, the focus of research is on how to improve the contrast of stripes and eliminate environmental interference. In view of how to improve the contrast of stripes, scholars have proposed to introduce lasers to replace the original light sources with poor monochromatic properties such as sodium and silver lamps. Because of the strong coherence of laser time and space, related technologies such as polarization coherence and frosted glass screens have been Use, greatly reduce the influence of stray light and overlapping stripes, improve the contrast of stripes; the influence of environmental factors is inherent and the size is uncertain, the dynamic interferometer comes into being, that is, the requirements of anti-vibration technology, corresponding to the interference of different detection caliber Instrument, there are different anti-vibration technology applications, but the overall is divided into passive antivibration technology and active anti-vibration technology.

Citation Download Citation

Zhencong Wu, Yufang Chen, and Min Wang "Research on the development status of surface inspection technology", Proc. SPIE 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications, 113340J (18 December 2019); https://doi.org/10.1117/12.2542992

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KEYWORDS

Interferometers

Mirrors

Prisms

Speckle

Light sources

Optical components

Spherical lenses

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