This PDF file contains the front matter associated with SPIE Proceedings Volume 11336, including the Title Page, Copyright information, Table of Contents, and Conference Committee lists.

We investigate a millimeter-size Calcium fluoride (CaF₂) microdisk resonator fabricated by a customized machining procedure. Stable coupling can be realized in our microdisk resonator coupled by a special tapered fiber. The mcirodisktaper coupling system exhibits an ultra-high Q factor up to ~10⁸. In particularly, our coupling system exhibits a freespectral- range low to ~0.03 nm (~3.91 GHz). The frequency is suitable in microwave photonic systems, such as optical filters, optoelectronic oscillators, and optical gyroscopes for several technological applications such as radar, light-wave technology, frequency synthesis, detection inertial navigation system.

In this paper, a local optimization algorithm (Levenberg-Marquardt algorithm) is employed for broadband EUV multilayer design. A merit function is optimized in the Levenberg-Marquardt algorithm, for achieving maximum reflectivity of the designed broadband EUV multilayer mirrors. Using this algorithm, the reflectivity of broadband EUV multilayer mirrors with different broadband for various central photon energy are designed and compared. Under the condition of normal incidence, the maximum average reflectivity of designed broadband EUV multilayer mirrors with 20 eV bandwidth for 40 eV, 60 eV and 80 eV central photon energy are 6%, 16% and 21% respectively, while the ones with 10 eV, 20 eV and 30 eV bandwidth for 80 eV central photon energy are 29%, 21% and 15% respectively. In addition, the effect of incident angle on the reflectivity of broadband EUV multilayer mirrors is also studied. It is found that the maximum average reflectivity of designed broadband EUV multilayer mirror with 20 eV bandwidth for 80 eV central photon energy increases from 21% to 53%, when the incident angle of light increases from 0° to 60°. We believe this research is important because it provides a guide for the design of broadband EUV multilayer mirrors with high reflectivity.

GaAs is an important short-wave near-infrared photocathode material. In this paper, the first-principles plane wave pseudopotential method based on the density functional theory framework is used to study the influence mechanism of external electric field on the electronic structure of GaAs. Applying an electric field in different directions to GaAs shows that the (011) electric field direction has the strongest effect on opening the GaAs energy gap. Then, the electric fields of different strength are applied along the (011) direction. The results show that the energy gap of GaAs is 0.937eV when no electric field is applied. With increasing the electric field strength in the (011) direction, the energy gap of GaAs decreases gradually, when the electric field strength reaches 1eV/Å/e, the energy gap of GaAs is almost zero. Notice that in the conduction band region where the total density of state of GaAs gradually shifts to Fermi surface and the Span gradually decrease with increasing the electric field strength, while valence band is the opposite of the conduction band.

In this paper, the comparative study of sensitivity of NGWSPR biosensor with Au, Ag, Cu and Al is presented. To achieve high sensitivity, the thickness of each layer in the proposed biosensor is optimized using genetic algorithm (GA). A constraint condition of reflectivity at resonance angle is used in the merit function (MF) of GA to realize large depth of dip. Using this method, NGWSPR biosensors with Au, Ag, Cu and Al are designed and analyzed. The sensitivity of designed Ag based NGWSPR biosensor is up to 289 °/RIU when using TiO₂ as the dielectric, which is 31.83%, 24.91% or 61.94% higher than the sensitivity of designed Au, Cu or Al based one. We believe our work is important because it compares the largest sensitivities of NGWSPR biosensors with different metals, and be helpful for highly sensitive biosensors development.

GaAs nanowires have widely applied in infrared devices in the past few years. However, the performance of GaAs nanowire photodetectors is strongly limited by the problem of large surface state density. At the same time, onedimensional GaAs nanowire as photosensors for infrared detection has been seldom studied. In this paper, a single GaAs nanowire infrared photodetector have been successfully fabricated and Ar plasma treatment is performed on the device to improve the performance. The treated GaAs nanowire device exhibits high responsivity of 108 A/W, which is about 6 times larger than the original one (~18 A/W). Besides, the external quantum efficiency up to 25312 % and the detectivity up to 9.21×10¹¹ cmHz^0.5W^-1. At the same time, the response time τ_r is significantly reduces from 86.40 ms to 3.36 ms, and the recovery time τf is almost remained as 212.48 ms. The significant enhancement is due to the improvement of nanowires surface quality. These results demonstrate that GaAs nanowire is an outstanding material in infrared field devices and plasma treatment is an effective way to realize high performance nanowire photodetectors.

The level of glutathione in human are closely related to various diseases. In this paper, a sensitive “Turn-On” sensor for glutathione is reported. The sensor was designed based on fluorescence resonance energy transfer (FRET) between fluorescein isothiocyanate (FITC) and gold nanoparticles (AuNPs). Energy transfer form donor (FITC) to acceptors (AuNPs) because of the electrostatic absorption, resulting in the quenching of FITC fluorescence. With the addition of glutathione, FITC detach from the surface of AuNPs, because of the strong force of Au-S bond. The distance between the FITC and AuNPs increased, the fluorescence of FITC will restore because of the destruction of FRET process. Based on this principle, we construct the “Turn-On” sensor to detect GSH and give fluorescence tests in different buffers and pH values.The results revealed that the neutral PBS buffer environment is the most suitable environment for sensor. The fluorescence intensity of system decrease gradually with the decreasing concentration of GSH. The linear range of glutathione concentrations in the detection system is 1~650mg/L. We obtain a satisfying result and it can be used to detect the high concentrations of glutathione content in human body environment.

Compared with metal nano-antennas metalens, the dielectric metalens has better optical characteristics in the optical band, has smaller ohmic loss, and is more advantageous. In addition, the problem of dispersion of metalens in the wide-band range has been a hot issue that experts have been scrambling to study in recent years. In view of the excellent transmission characteristics of silicon in the near-infrared region, the optical properties of rectangular silicon nano-antennas in the near-infrared region are re-examined and simulated. And using simulation software to model and analyze it, a broadband achromatic dielectric metalens in the near-infrared band based on height variation to adjust the phase is designed. The paper demonstrates the broadband achromatic focusing characteristics of its working in transmission mode, its focusing efficiency can be as high as nearly 69%, and the focal length remains basically unchanged when λ is from 950 to 1100nm. It is a new sub-wavelength non-planar structure based on height variation, offering important opportunities for applications in circular polarized optics, fiber sensors, laser scanning fluorescence microscopy, optical signal transmission, and integrated on-chip devices in the forthcoming future.

Based on the principle of antenna pattern multiplication as the product of the element pattern and array factor, a simple and flexible method to generate hollow-tube arrays with predetermined properties is proposed. This approach can be easily realized in a 4Pi focusing system by reversing the field eradiated from the collinear antenna array whose elements are isotropic magnetic current sources. All hollow tubes produced by this method are pure azimuthally polarized fields whose intensity distribution is nearly unchanged along the entire depth of focus. Numerical results show that the appearance and position of the focusing field only depend on the element pattern and array factor, respectively. These peculiar focusing field arrays are suitable for multi-particle trapping and manipulation, materials processing, and optical lithography.

Tapered metallic nanostructures can channel and focus surface plasmons to the sharp apex to generate enormous near field enhancement. This distinct feature enables light guiding and manipulating at nanoscale confinement, which have been widely applied on high-resolution near-field optical imaging, high-order harmonic generation enhancement and ultrasensitive detection, etc. In this paper, we shown that silver nanoneedles with high aspect rate and ultra-smooth surface can be utilized as on-chip plasmonic nanofocusing waveguides operated at visible region. The nanoneedles were synthesized through a focused optical field induced chemical process. Verified by the observation of non-uniform plasmon beats, we shown that these nanoneedles are excellent nanofocusing waveguides with divergent effective refractive index for plasmon propagating modes. These findings would be beneficial for the development of remote-excitation detection/sensing and plasmonic circuits constructing, etc.

The crosstalk problem between the background light and the signal light of the diffractive optical element severely degrades the image quality and limits the practical application. In this paper, we proposed an off-axis imaging technology aimed at multifocal diffractive lenses and performed geometrical imaging analysis to investigate the imaging distribution. Off-axis imaging ensured a high signal-to-noise ratio by separating the signal and the noise spatially and provided a larger space for parallel synchronization processing in different image plane. Taking the bifocal Greek-ladder lens as an example, the experiment achieved zero-crosstalk multiplanar images and verified the law of diffractive imaging. Besides, the critical condition for zero-crosstalk imaging was also studied.

Crystalline metallic nanowires have been indispensable “building-blocks” to construct functional elements for future integrated nano-photonic devices and circuits. In this work, by the polarization measurements, we reveal that the propagating surface plasmons emission from a thick nanowire (D ~ 300 nm) are split into two parts: I₁ and I₂, with the polarizations nearly perpendicular to the respective emitting facets. By changing excitation polarization, splitting ratio (I₁/I₂) can be further tuned. The light splitting mechanism in this single thick nanowire is due to the interference of propagating surface plasmons modes along the nanowire, which modulates field distribution at the end facets. These findings demonstrate that single thick silver nanowire with well-defined end facets can naturally provide multiple outcoupling channels and function as a simple nanoscale polarization beam splitter. This work sheds a new light on our understanding about surface plasmons propagation and emission, and would certainly benefit the development of waveguides design and integrated plasmonic devices.

A antireflection film with adjustable refractive index from 1.17 to 1.41 was prepared at room temperature via a template-free sol–gel method, using tetraethylorthosilicate(TEOS) as co-precursor. In this study, the regulation of the refractive index is achieved by mixing different volumes of acid-catalyzed silica sol having a refractive index of 1.41 with a base-catalyzed silica sol having a refractive index of 1.17. The silica coating, with a refractive index of 1.2332, prepared by this base/acid two step catalysis sol-gel process can increase the transmittance of K9 glass by about 3.5%.

Self-assembled GaN/Al_0.5GaN quantum dots (QDs) were grown on a c-plane sapphire by Stranski- Krastanov (S-K) mode in metalorganic vapor-phase epitaxy (MOCVD). The growth window for GaN QDs by S-K is very narrow owing to the small lattice mismatch (1.25%) of the GaN/Al_0.5GaN. In this work, we find that the growth duration and growth interruption possess distinct and regular effects on the size and density of GaN/Al0.5GaN QDs, which can be utilized as growth optimization windows. In the end, the uniform-size GaN QDs with a density of 1.7×10¹⁰ cm^-2 are achieved. A strong PL peak at 3.36eV originated from the uncapped GaN/Al0.5GaN QDs is observed, compared with the peak at 4.5eV assigned to the underlying Al_0.5GaN template.

Laser beam combining technology currently plays an important role in optical systems. The combined beam grating is the most important realization component inside, so it is necessary to study the beam grating. Conventional metal gratings have high absorbance, and the damage threshold of metal gratings is usually not high. Multilayer dielectric film gratings are necessary for research because they have almost no absorption and high damage thresholds at the same time as high diffraction efficiency. Based on the theory of rigorous coupled wave (RCWA), a multilayer dielectric film grating model is established and a multilayer dielectric film grating with a center wavelength of 1053 nm is designed in the paper After a series of optimal design, the following results are obtained. Ta2O5 and SiO2 are selected as multi-layer material, and the multi-layer structure is S(HL)^12HTA .The groove density is 1480 lines/mm. The profile of grating grooves is rectangular .The duty cycle of surface relief structure is between 0.3-0.4, the groove depth is between 750-850nm, the sum of residual thickness and groove depth is between 930-1030nm.The -1st diffraction average efficiency of the grating is over 95% at the Littrow angle (51.2 degrees).Wavelength bandwidth greater than 40nm.The diffraction efficiency is the same as that of a metal grating .At the same time, the laser induced damage threshold can be improved.

Two-dimensional two-period gradual Photonic Crystals (PhCs) structure arrays were designed by double-cone interference method (3+3), and the effects of different polarization combinations of inner and outer cone beams on the double-cone interference were studied. By adding a beam of light in the third dimension to the double-cone interference, umbrella-like double-cone interference and inverted umbrella-like double-cone interference are constructed, and the formed three-dimensional PhCs is observed to study the periodicity of the photonic structure. This structure is very important for optical coupling and light integration.

Mixing of anions (I/Br) in metal halides perovskite for photodetectors attracted much attention due to their inexpensive fabrication and vast optoelectronic properties. The main objective of this compositional anion mixing (I/Br) is to improve the stability of bromide-iodide based perovskite devices. A bilayer lateral MAPbI^3-xBr_x/TiO₂ photodetector is designed to observe the performance and stability of the device by changing the ratio of anion. Responsivity, detectivity, and ON/OFF ratio of the photodetector devices are calculated by changing the anion composition. An appropriate (MAPbI₂Br) bromide-iodide ratio promotes the crystallization of film and increases stability of photodetector device from ambient environment. By changing the anion ratio, band gap of MAPbI_3-xBr_x thin films are changed from 1.59 eV to 2.33 eV. Responsivity calculated for MAPbI₃, MAPbBr₃, MAPbI₂Br, and MAPbIBr₂ devices are 5.22 A/W, 0.23 A/W, 1.86 A/W, and 0.70 A/W, respectively, under light illumination of 0.1 mW cm^-2. Under a bias of 5 V, the value of detectivity for MAPbI₃, MAPbBr₃, MAPbI₂Br, and MAPbIBr₂ devices are 2.88 × 10¹³ J, 1.7 × 10¹² J, 1.4 × 10¹³ J, and 5.95 × 10¹² J, respectively. Changing anion composition also affects the on/off ratio of the devices. MAPbI₃, MAPbBr₃, MAPbI²Br, and MAPbIBr₂ devices show on/off ratio of 5 × 10³, 400, 3.6 × 10³, 1.6 × 10³, respectively.

Quantum dot (QD) confine charge carriers which results in strongly localized wave functions (WF), discrete energy eigen values and remarkable physical and novel device properties. In this paper, three-dimensional confinement regions of InN are obtained on a wetting layer (WL) in a GaN semiconducting matrix. Different structures are approximated with the influence of WL. The main objectives are: 1) To study the electronic states of single QD structure with WL and the role of their size and shape in determining the WFs and their eigen energies. 2) To study the interaction of neighboring QDs and their properties of WFs. One band Schrödinger equation in the effective mass approximation is used to compute the electronic states of QDs. Envelope function approximation with BenDaniel-Duke boundary condition is used in combination to Schrödinger equation for the calculation of eigen energies. Eigen energies are solved for the quasi-bound states using an eigenvalue study. The transfer matrix method is used to study the quantum tunneling of InN WFs, which is a direct bandgap material, through neighbor barriers of GaN material. Varying the QD radius (1nm to 8 nm) decreases the ground state energy of three structures of QD. WL thickness is increased from 0.5 nm to 3 nm which results in decrease of the eigen energies. Quasi bound state, transmission coefficient and reflection coefficient for the conical QD system are simulated. Changing the barrier width (1 nm to 3 nm) promotes higher probability of electron WF to pass through barriers. Absorption coefficient calculated for the system is 10⁵ μm^-1.

The III-Nitride material system offers significant potential in developing high efficiency solar cells (SC) due to their tunable bandgap (0.7 eV- 3.42 eV) with varying indium (In) concentration. Few characteristics of InGaN include wide and direct bandgap (E_g), high absorption coefficient (10⁵ cm^-1) and longer lifetimes. In this paper, InGaN/GaN SC with incorporation of GaN interlayers in absorber layer with an In content of 0.10 has been modeled and studied. InGaN is used as absorber, whereas GaN is used as window layers and strain reducing layer within the absorber layer. Increased P-GaN layer thickness increases short circuit current density (J_sc) to 2.5 mAcm^-2, but lowers the open circuit voltage (V_oc) to 2.11 V. GaN layer is taken to be thin enough to allow tunneling between InGaN layers and thick enough to be effective. Increase in GaN thickness increases V_oc and decreases J_sc. J_sc is higher for smaller thickness of InGaN whereas V_oc is higher for thicker absorber layer. The n-GaN layer thickness does not play important role in absorption of carrier. The V_oc and J_sc of the device are 2.52 V and 0.653 mAcm^-2, respectively.

A plasmonic sensor which can detect the refractive index and the polarization of incident light is proposed. The sensor is based on a gold composite structure constructed from a gold film which was etched a plurality of circular arc-shaped slits. The transmission spectra of the composite structure are theoretically studied using the finite-difference time-domain method (FDTD), and the influence of structure parameters on the transmission spectra are also studied. Moreover, it was found that the transmission spectra of are sensitive to environment refractive index, which can be used to detect refractive index. Specifically, the sensitivity of 550 nm/RIU was obtained after optimizing the structure parameters. Due to the asymmetry of the sensor structure, this design can also detect the polarization direction of light.

A nanoslit array is introduced on the silicon waveguide, and the phase difference is controlled by the slit width to satisfy the function of the focusing lens. If keep the designed width and depth of the slit in accordance with the focusing effect unchanged, when the incident wavelength changes, the focal position must change accordingly, and the dispersion effect is significant. In order to achieve the achromatic effect, the refractive index of the surrounding medium is changed while changing the wavelength. Finally, the refractive index of the surrounding medium which can keep the focal length constant at the wavelength of 1550-1950nm is obtained, and the equation that the change of the refractive index and the wavelength of the medium makes the focal length constant is obtained. The achromatic effect can be effectively achieved, and applications range of achromatic metalens from imaging in optical communications to telescopes in the astronomical field.

The nonlinear absorption properties of spherical silver nanoparticles (AgNPs) with average sizes of 15nm and 30 nm were studied by Z-scan technique. The experimental results show that under the same excitation conditions, both samples show the switch behavior from saturable absorption (SA) to reverse saturable absorption (RSA). The research results show that, SA is caused by plasma bleaching of ground state, and the RSA results from free-carrier absorption. And nonlinear properties of AgNPs is size-dependent. The estimated values of 𝐼_𝑆 were 1.62 × 10¹¹𝑊⁄𝑚² and 2.40 × 10¹¹𝑊⁄𝑚² for AgNPs with size 15nm and 30nm, respectively, where as the corresponding β values were 0.56 × 10⁻¹⁰ 𝑚⁄𝑊 and 1.17 × 10⁻¹⁰ 𝑚⁄𝑊. Besides, the ultrafast dynamics of the AgNPs was studied using white-light pump-probe technology. The experiments show that the process includes a slow decay and fast decay process. The theoretical values of slow decay were 5.5ps and 3.1ps for 15nm AgNPs and 30nm AgNPs, respectively, and the corresponding fast decay process values were 20ps and 55ps. The research results show that the ultrafast dynamics of AgNPs is size-dependent. The slow process was due to the electron-phonon coupling, and the fast process is due to the phonon-phonon coupling.

Compared with bulk materials, the corresponding metal nanoparticles have different optical and nonlinear optical effects. The research and analysis show that the properties of nanostructures with different sizes or shapes are different when the materials are the same. For Au nanoparticles, their SPR absorption bands can be tuned throughout the visible spectrum by changing the size and shape of nanoparticles. In this paper, the optical properties of gold nontriangular structures have been studied by finite difference time domain (FDTD) method. The effects of size, thickness and dielectric constant of gold nanometer triangle on its absorption spectrum were discussed. There are three absorption peaks in the cash nontriangular structure. When the thickness is the same (20nm), with the increase of the size of the gold triangular prism structure, the three absorption peaks shift red, the red shift speed increases gradually, and the absorption coefficient increases in turn. The red shift velocity of the main peak absorption peak is stronger than that of the secondary absorption peak. Under the same size structure (100nm), with the increase of gold nanometer triangle thickness, the main absorption peak shifts blue and the absorption coefficient decreases in turn. When the size and thickness are the same, with the increase of dielectric constant, the three absorption peaks shift red, and the absorption coefficient decreases in turn.

We propose and experimentally demonstrate an optofluidic refractive index sensor based on surface plasmon resonance with a figure of merit (FOM) reaching 20 in fluids at oblique incidence. The device consisting of a dielectric nano-grating sandwiched between double-layer gold stripes. A finite difference time domain (FDTD) method is employed to understand the optical properties and determine appropriate device parameters. The double-layered metal nano-grating (DLMNG) is fabricated by combining two beam interference lithography and electron beam evaporation deposition. A refractive index sensitivity of more than 560 nm/RIU is obtained using an optimized structure. The simple optical configuration of the DLMNG with high refractive index sensitivity make it possible for optofluidic sensors to be a promising candidate as a functional optical component in label-free biomedical sensing and integrated microfluidic chips.

Plasmonic nanorod metamaterials exhibit transversal and longitudinal resonance modes. It is found that the resonance intensity of the transversal modes (T-Modes) excited by the p- polarized wave is obviously larger than the intensity for the s- polarized wave at the wavelength of the transversal resonance, and the resonance intensity of the longitudinal modes (L-Modes) excited by the s- polarized wave is clearly larger than the intensity for the p- polarized wave at the longitudinal resonance wavelength, indicating a distinct polarization characteristics, which results from excitation of the different resonance modes of surface plasmons at different wavelengths. Moreover, the polarization behavior in near field regions for the different resonance modes has been demonstrated by the electric field distributions of the plasmonic nanorods based on FDTD simulation. In addition, the working wavelength of the polarizer can be tuned by the diameter and length of the silver nanorods in the visible spectral range, higher extinction ratios and lower insertion losses can be achieved based on the different resonance modes associated with the different polarizations. The polarizers will be a promising candidate for its potential applications in integration of nanophotonic devices.

We propose an innovative structural design based on a metamaterial absorber in the terahertz band. And verified the absorption curve of the new structure by using FDTD software simulation. The absorption curves of the light source at different incident angles and polarizations were simulated.The simulation results show that the multi-layer covering structure effectively increases the absorption bandwidth of the metamaterial absorber in the terahertz band. And the absorption curve is higher and flatter.

In this paper, we report the study on the size regulation of Ga-droplets by in situ laser irradiation. Gallium (Ga) droplets are grown on GaAs (001) substrate by molecular beam epitaxy (MBE) and the in situ laser irradiation is carried out by using an ultraviolet pulsed laser. The results show that: The laser irradiation will cause the expansion of Ga-droplets and then the adjacent Ga-droplets can touch with each other and larger Ga-droplets can be formed by the fusion of two or more droplets. So the size of Ga-droplets can be re-modified by laser irradiation and such modification is positively correlated with the irradiation intensity. In other words, we can easily define the size of Ga-droplets by using different laser irradiation energy.

The casing is one of the key components in the aeroengine. It is a typical complex thin-walled structure, and has the characteristics of large component size, many structural elements, complex profile, huge measurement workload, thin structure and easy deformation, and high precision. The requirements of measuring efficiency and measurement accuracy are getting higher and higher. At present, the three-coordinate measuring machine (CMM) is widely used to measure aeroengine casing in China's aeroengine manufacturers. Taking some casing as an example, CMM is required to measure 256 items, and the measuring period is more than 1 day. In order to reduce the workload and improve the efficient in measuring aeroengine casing, the research develops a multi-axis measuring system based on a high-precision turntable, which has been improved to meet the performance. At the same time, the error of the multi-axis measurement system is discussed to achieve high precision and high efficiency measurement.

In this paper we demonstrate a branched Rutile TiO2 nanorod structure which used as a model architecture for efficient photoelectrochemical devices for simultaneously offers a large contact area with the electrolyte, excellent lighttrapping characteristics, and a highly conductive pathway for charge carrier collection. We developed a facile hydrothermal synthesis method to achieve rutile TiO2 nanorod arrays on FTO substrate without use of any acid. The morphology of nanorods can be finely tuned by changing the growth parameters, and the potential of the as-made rutile TiO2 nanorods in perovskite solar cells was evaluated, showing power conversion efficiency up to 11.1%.

A photonic nanojet (PNJ) is a highly focused optical beam with a subwavelength waist on the shadow side of the dielectric microparticle. In this paper, we propose and numerically investigate the PNJ formed by a micro/nanofiber (MNF) array. Three-dimensional finite-difference time-domain (FDTD) simulations are conducted and demonstrate that an ultra-narrow photonic nanojet with a full-width at half maximum (FWHM) waist of 0.2λ can be obtained. Besides, key characteristic parameters of PNJ, including PNJ length, maximum intensity, and FWHM can be flexibly tuned by modifying the refractive index of the MNF, the diameter of the MNF, and the incident wavelength.

Accuracy and correctness are significant to the entire measurement. The measurement results of new methods are usually compared with the results of mature measurement methods aiming at evaluating the consistency of the two methods, which can estimate the feasibility of new methods. Two criteria are usually utilized to evaluate the consistency of surface measurements. One criterion is to compare the Peak-Valley (PV) value and Root-Mean-Square (RMS) value directly. However, lots of surfaces which are not similar or even completely different share the same PV and RMS values. The other criterion is to analyze the point-to-point difference. But this criterion still utilizes the PV value and RMS value as the consistency evaluation of the point-to-point difference. Surface Error Consistency Coefficient (SECC) is proposed as a criterion in this paper. In this criterion, the principle of cross-correlation is introduced to evaluate the consistency of two measurement results and all the data are utilized. This criterion can evaluate the consistency of two surfaces by a percentage and is not susceptible to some special single points. In this paper, some surfaces are evaluated in simulations, and the consistency of surface maps by Coordinate-transform method and Fourier-transform method is evaluated.