Paper
18 December 2019 Monte Carlo simulation for scanning white light interference measuring data of fracture surface
Author Affiliations +
Proceedings Volume 11338, AOPC 2019: Optical Sensing and Imaging Technology; 113380X (2019) https://doi.org/10.1117/12.2542825
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China
Abstract
Scanning white light interferometry (SWLI) has become an established method to measure the geometrical form of objects. However, due to its complicated condition on the fracture surface, the noises severely degrade its interference signal quantity, consequently cause large reconstruction error. To improve the reconstruction accuracy, this paper proposes a method which adopts the Monte Carlo algorithm to simulate the interference data of a fracture surface. In our method, a random Gaussian surface is first generated as the fracture surface in the following experiments. Then, a numerical model of white light interference is constructed and thereby interference images based on Gaussian surfaces are simulated by the use of Monte Carlo method. In the experiments, the influence of surface parameters and repeated times of calculation on the results of simulation is observed and the process of longitudinal equi-distance step scanning in interference detection is simulated. The experimental results show that when the repeated times is large enough, the characteristics on the interference image becomes obvious. By observing the longitudinal interference signal, the interference curve shows similar properties to a interferogram signal. Finally, we analyze the theoretical feasibility of a parallel integral filter for the experimentally measured interference data. The results prove that the simulated interference data possesses primary capability in restoring surface information.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Binwei Yang, Yufang Liu, and Wendong Zou "Monte Carlo simulation for scanning white light interference measuring data of fracture surface", Proc. SPIE 11338, AOPC 2019: Optical Sensing and Imaging Technology, 113380X (18 December 2019); https://doi.org/10.1117/12.2542825
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KEYWORDS
Monte Carlo methods

Data modeling

Computer simulations

Optical interferometry

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