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18 December 2019 Research on the key technology for processing efficiency improvement of aluminum alloy mirror chemical mechanical polishing
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Proceedings Volume 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation; 1134116 (2019) https://doi.org/10.1117/12.2543939
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China
Abstract
In order to improve the processing efficiency on the basis of obtaining good surface quality for aluminum alloy mirror with the chemical mechanical polishing(CMP) method, the status between abrasives and workpiece surface is researched adopting the elastic plastic deformation and nano indentation theory. The material removal mechanism is revealed through the CMP material removal model which is established on the analysis of surface topography, particle force and removal efficiency. It is found that the discontinuous down pressure which is related to surface morphology of the polished pad has a serious influence upon removal efficiency as well as the original pressure and the rotate speed of pad. With the support of these results, a variable parameter polishing method is proposed. The actual experiment result shows that the processing time is shortened by about 64% compared with the original method on a Φ100mm plane sample in the process of roughness improvement from Ra 5.03nm to Ra 2.95nm. The validation of variable parameter CMP method is certificated.
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Tao Zhao, Xiaoqiang Peng, Hao Hu, Chaoliang Guan, and Yifan Dai "Research on the key technology for processing efficiency improvement of aluminum alloy mirror chemical mechanical polishing", Proc. SPIE 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation, 1134116 (18 December 2019); https://doi.org/10.1117/12.2543939
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