Compensation of nonlinear errors of phase-shifted fringes in phase measuring deflectometry

Zhenqi Niu; Xiangchao Zhang; Xueyang Xu; Yifan Zhu; Shaoliang Li; Siping Peng

doi:10.1117/12.2541472

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13 November 2019 Compensation of nonlinear errors of phase-shifted fringes in phase measuring deflectometry

Zhenqi Niu, Xiangchao Zhang, Xueyang Xu, Yifan Zhu, Shaoliang Li, Siping Peng

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Proceedings Volume 11343, Ninth International Symposium on Precision Mechanical Measurements; 1134303 (2019) https://doi.org/10.1117/12.2541472
Event: International Symposium on Precision Mechanical Measurements 2019, 2019, Chongqing, China

Abstract

In the phase measuring deflectometry, the phase error caused by the nonlinear intensity response, called the gamma distortion, can negatively affect the measurement quality of specular surfaces. Based on the generic exponential four-step phase-shifting fringe modal, this paper proposes a flexible and simple phase retrieval method to eliminate the phase errors without complex calibration or additional fringe patterns. The experimental results illustrate that the proposed method can accurately retrieve the phases from the distorted fringe patterns with the Gamma distortion, and the measurement precision can henceforth be improved.

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Zhenqi Niu, Xiangchao Zhang, Xueyang Xu, Yifan Zhu, Shaoliang Li, and Siping Peng "Compensation of nonlinear errors of phase-shifted fringes in phase measuring deflectometry", Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 1134303 (13 November 2019); https://doi.org/10.1117/12.2541472

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