An absolute measurement method of time-grating angular displacement sensor

Bao-hua Qu; Tian-heng Zhang; Dong-lin Peng; Yang-yang Wang; Feng-jun Li

doi:10.1117/12.2547184

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13 November 2019 An absolute measurement method of time-grating angular displacement sensor

Bao-hua Qu, Tian-heng Zhang, Dong-lin Peng, Yang-yang Wang, Feng-jun Li

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Proceedings Volume 11343, Ninth International Symposium on Precision Mechanical Measurements; 113430D (2019) https://doi.org/10.1117/12.2547184
Event: International Symposium on Precision Mechanical Measurements 2019, 2019, Chongqing, China

Abstract

Angular displacement sensor plays an indispensable role in high-precision angular measurement and position feedback. With the development of sensing technology, some traditional incremental measurement methods have been unable to meet the requirements such as anti-interference ability, lossless of power-off data information and other factors that are susceptible to environment and mechanical system changes. Therefore, this paper has proposed a method based on combined measurement for absolute measurement of time-grating angular displacement sensor, which is mainly assembling two time-grating sensors that use different pole pair in a co-prime relationship on the axis. By this method, it can build high-precision and high-resolution sensor that meets vernier-subdivision principle in the form of a combination of "fine sensor and fine sensor". The sensor model and simulation experiment results are introduced by Inventor 2016 and ANSYS Maxwell 16.0, respectively. Then, the absolute position measurement method is validated by analyzing the initial phase of the induced electromotive force of the simulation experiment results with the mathematical method. Experiment results show the absolute measurement method is feasible.

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Bao-hua Qu, Tian-heng Zhang, Dong-lin Peng, Yang-yang Wang, and Feng-jun Li "An absolute measurement method of time-grating angular displacement sensor", Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 113430D (13 November 2019); https://doi.org/10.1117/12.2547184

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