Photonic terahertz technology for layer thickness measurements (Conference Presentation)

Daniel Molter; Jens Klier; Stefan Weber; Tobias Pfeiffer; Michael Kolano; Oliver Boidol; Mirco Kutas; Björn Haase; Joachim Jonuscheit; Georg von Freymann

doi:10.1117/12.2553340

30 March 2020 Photonic terahertz technology for layer thickness measurements (Conference Presentation)

Daniel Molter, Jens Klier, Stefan Weber, Tobias Pfeiffer, Michael Kolano, Oliver Boidol, Mirco Kutas, Björn Haase, Joachim Jonuscheit, Georg von Freymann

Author Affiliations +

Proceedings Volume 11348, Terahertz Photonics; 1134804 (2020) https://doi.org/10.1117/12.2553340
Event: SPIE Photonics Europe, 2020, Online Only

Abstract

Layer-thickness measurement is one of the most promising and attractive fields of application for terahertz measurement systems, as they really provide benefits in comparison to competing techniques. In contrast to ultrasound systems, terahertz measurements can be carried out without a coupling medium and is therefore a truly contactless measurement. The possibility to measure individual layers in a multilayer stack is highly advantageous in contrast to established eddy current measurement devices. Unlike X-ray devices, terahertz radiation of common measurement systems is not harmful to biological tissue. Terahertz measurement systems have undergone a remarkable development in terms of the performance as well as in the evaluation algorithms. Increase of speed and enhancement of measurement robustness make these optically complex systems ready for industrial employment. In our contribution, we will cover the development of photonic terahertz measurement systems with a focus on terahertz layer thickness determination.

Conference Presentation

Citation Download Citation

Daniel Molter, Jens Klier, Stefan Weber, Tobias Pfeiffer, Michael Kolano, Oliver Boidol, Mirco Kutas, Björn Haase, Joachim Jonuscheit, and Georg von Freymann "Photonic terahertz technology for layer thickness measurements (Conference Presentation)", Proc. SPIE 11348, Terahertz Photonics, 1134804 (30 March 2020); https://doi.org/10.1117/12.2553340

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