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This PDF file contains the front matter associated with SPIE Proceedings Volume 11352 including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org.

The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from these proceedings:

Author(s), “Title of Paper,” in Optics and Photonics for Advanced Dimensional Metrology, edited by Peter J. de Groot, Richard K. Leach, Pascal Picart, Proceedings of SPIE Vol. 11352 (SPIE, Bellingham, WA, 2020) Seven-digit Article CID Number.

ISSN: 0277-786X

ISSN: 1996-756X (electronic)

ISBN: 9781510634763

ISBN: 9781510634770 (electronic)

Published by SPIE

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Printed in the United States of America by Curran Associates, Inc., under license from SPIE.

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Paper Numbering: Proceedings of SPIE follow an e-First publication model. A unique citation identifier (CID) number is assigned to each article at the time of publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online and print versions of the publication. SPIE uses a seven-digit CID article numbering system structured as follows:

  • The first five digits correspond to the SPIE volume number.

  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc. The CID Number appears on each page of the manuscript.

Authors

Numbers in the index correspond to the last two digits of the seven-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first five digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Abjaghou, Ali, 0W

Aftab, Maham, 02

Aguirre-Aguirre, Daniel, 1A, 1H

Andreoli, F., 16

Arapov, Yu. D., 0I

Artigas, Roger, 0L

Averin, Dmytro, 1J

Banerjee, Saon, 1G

Baselt, Tobias, 12

Beermann, Rüdiger, 0B, 0E, 0S

Behrens, Bernd-Arno, 0B

Belkner, Johannes, 0N

Bellanger, Cindy, 0V

Bermudez, Carlos, 0L

Betker, T., 0C

Bischoff, Jörg, 0P, 14

Bollanti, S., 16

Borovytsky, Volodymyr, 1J

Bossemeyer, Hagen, 0S

Botha, R., 05

Brecht, Marc, 0Y

Brunotte, Kai, 0B

Cadevall, Cristina, 0L

Cafarella, L., 16

Camargo-Fierro, Christian, 1A

Campos-García, Manuel, 1A, 1C, 1H

Carrion, Claire, 0W

Cattaneo, H., 05

Chang, Hui-Ting, 11

Chattoraj, Subhankar, 1G

Chen, Hong-Yi, 1K

Chen, Shao-Heng, 1K

Choi, Heejoo, 02

Claveau, Rémy, 1B

Coggrave, C. R., 0F

Colonna de Lega, Xavier, 0M

Cordier, Christophe, 1B

Coupland, Jeremy, 0K

Dantanarayana, H. G., 0F

Davila-Peralta, Christian, 02

de Groot, Peter, 07, 0M

De Meis, D., 16

Di Lazzaro, P., 16

Di Mauro, D., 16

Diekmann, Robin, 0S

DiSciacca, Jack, 0M

Dubin, Matt, 02

Eastwood, Joe, 0A

Engel, Thierry, 1B

Erol, Cihan, 03

Fleischle, David, 0Y

Flora, F., 16

Flury, Manuel, 1B

Folwill, Yannick, 0U

Gallerano, G. P., 16

Gannavarpu, Rajshekhar, 0J

Gao, Feng, 1I

Gautam, Surya Kumar, 1L

Gijs, M. A. M., 1N

Graves, Logan, 02

Guerra, Flavio, 03, 04

Guo, W., 0F

Gupta, Rishabh, 1G

Gurevich, B. S., 1E

Hahn, Robin, 0Y

Haist, Tobias, 03, 04, 0Y

Hämmerling, Freya-Elin, 0Y

Hannesschlaeger, G., 0Z

Hartlieb, Simon, 03

Hartmann, Peter, 12

Hauler, Otto, 0Y

Hayashi, Neisei, 1D

Heise, B., 0Z

Hinz, Lennart, 0G

Hofmann, Martin, 0N

Hsieh, Hung-Lin, 1K

Huerta-Carranza, Oliver, 1A, 1H

Huntley, J. M., 0F

Hyatt, Justin, 02

Isa, Mohammad A., 0A

Jiang, Xiangqian, 1I

Jin, Lei, 1D

Jinwal, Urvashi, 1L

Kang, Hyukmo, 02

Kästner, Markus, 09, 0B, 0C, 0E, 0G, 0S, 1M

Kazakov, Vasily I., 18

Kim, Dae Wook, 02

Kirchner, Johannes, 0N

Koch, Edmund, 12

Kubasov, P. V., 0I

Lai, Yi-Xing, 1K

Lanzoni, Patrick, 0V

Laurent, Antoine, 0R

Leach, Richard, 07, 0A

Lee, Chih-Kung, 11

Lee, Shu-Sheng, 11

Lefort, Claire, 0W

Lehmann, Peter, 0P

Leiss-Holzinger, E., 0Z

Lindlein, N., 0H

Liu, Mingyu, 0Q

Liu, Sifan, 1D

Lowman, Andrew, 02

Magnol, Laetitia, 0W

Manske, Eberhard, 0N, 0P, 14

Mantel, K., 0H

Marbach, Sébastien, 1B

Martínez, Pol, 0L

Mastylo, Rostyslav, 14

Matilla, Aitor, 0L

Meguellati, S., 19

Melchert, Nils, 09

Mezi, L., 16

Middendorf, Philipp, 1M

Migliozzi, D., 1N

Mondal, Soumen, 1G

Montgomery, Paul, 1B

Montrésor, Silvio, 0R

Mukherjee, Asis, 1G

Murra, D., 16

Murra, L., 16

Naik, Dinesh N., 1L

Nelsen, Bryan, 12

Nikolaev, Nikolay, 0K

Novikova, Yulianna A., 18

Oh, Chang-Jin, 02

Osten, Wolfgang, 03, 0Y

Pahl, Tobias, 0P

Panchal, Pramod, 1L

Patra, Parthasarathi, 1G

Peham, L., 0Z

Peña-Conzuelo, Andrés, 1A, 1C, 1H

Pérez-Lomelí, Juan Salvador, 1A

Piano, Samanta, 0A

Picart, Pascal, 0R

Pratiher, Sawon, 1G

Primot, Jérôme, 0V

Pultar, Richard, 0M

Quach, Henry, 02

Quentin, Lorenz, 0B, 0C, 0E

Rebner, Karsten, 0Y

Reithmeier, Eduard, 09, 0B, 0C, 0E, 0G, 0S, 1M

Ringkowski, Michael, 03

Rothau, S., 0H

Rouzé, Bastien, 0V

Ruiz, P. D., 0F

Saikia, Barnali, 1G

Sawodny, Oliver, 03

Schwanke, Oliver, 0Y

Senin, Nicola, 0Q

Set, Sze Yun, 1D

Sims-Waterhouse, Danny, 0A

Smith, Greg, 02

Steinitz, Adriana, 04

Su, Rong, 07

Tahon, Marie, 0R

Taudt, Christopher, 12

Tavleev, A. A., 0I

Thakur, Sudipta, 1G

Thomas, Matthew, 07

Trumper, Isaac, 02

T. S., Athira, 1L

Tscherpel, Michael, 03

Vaganov, Mikhail A., 18

Vicca, D., 16

Vicoli, G., 16

Vishnoi, Ankur, 0J

Wang, Chun-Hsiung, 11

Wu, Wen-Jong, 11

Xu, Yongjia, 1I

Yamashita, Shinji, 1D

Yaroschuk, P. N., 0I

Yoo, Hyemin, 02

Zaichenko, K. V., 1E

Zamkotsian, Frédéric, 0V

Zappe, Hans, 0U

Zhang, Chao, 1D

Zhang, Hui, 0A

Zhang, Zheyuan, 1D

Zhao, B., 1N

Ziolek, C., 05

Zirizzotti, A., 16

Zorin, I., 0Z

Conference Committee

Symposium Chairs

  • Francis Berghmans, Vrije Universiteit Brussel (Belgium)

  • Thierry Georges, Oxxius SA (France)

  • Paul C. Montgomery, Université de Strasbourg (France)

  • Lluis Torner, ICFO Barcelona (Spain)

Conference Chairs

  • Peter J. de Groot, Zygo Corporation (United States)

  • Richard K. Leach, The University of Nottingham (United Kingdom)

  • Pascal Picart, Laboratoire d’Acoustique de l’Université du Maine (France)

Conference Programme Committee

  • Jürgen W. Czarske, Technische Universität Dresden (Germany)

  • Fengzhou Fang, Tianjin University (China)

  • Pietro Ferraro, Istituto Nazionale di Ottica (Italy)

  • Cosme Furlong, Worcester Polytechnic Institute (United States)

  • Yoshio Hayasaki, Utsunomiya University (Japan)

  • Michal Józwik, Warsaw University of Technology (Poland)

  • Dae Wook Kim, James C. Wyant College of Optical Sciences (United States)

  • Peter H. Lehmann, Universität Kassel (Germany)

  • Paul C. Montgomery, Université de Strasbourg (France)

  • Andreas Ostendorf, Ruhr Universität Bochum (Germany)

  • Yukitoshi Otani, Utsunomiya University (Japan)

  • Heidi Ottevaere, Vrije Universiteit Brussel (Belgium)

  • Nicolas Passilly, FEMTO-ST (France)

  • Gabriel Popescu, University of Illinois (United States)

  • Christof Pruss, Universität Stuttgart (Germany)

  • Guohai Situ, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (China)

  • Rong Su, The University of Nottingham (United Kingdom)

  • Jean-François Vandenrijt, Centre Spatial de Liège (Belgium)

  • Xiaocong Yuan, Nankai University (China)

Session Chairs

  • 1 Measuring Complex Optical Systems and Components

    Peter J. de Groot, Zygo Corporation (United States)

  • 2 Extending the Limits of What Can be Measured

    Pascal Picart, Laboratoire d’Acoustique de l’Université du Maine (France)

  • 3 State-of-the-Art Photogrammetry and Structured Light

    Richard K. Leach, The University of Nottingham (United Kingdom)

  • 4 Optical Metrology in Practice

    Richard K. Leach, The University of Nottingham (United Kingdom)

  • 5 Advanced Measuring Microscopes

    Jürgen W. Czarske, TU Dresden (Germany)

  • 6 Deep Learning, Machine Learning, and Model-based Methods

    Pietro Ferraro, Istituto di Scienze Applicate e Sistemi Intelligenti “Eduardo Caianiello” (Italy)

  • 7 Resolution, Ellipsometry, and Hyperspectral Imaging

    Jean-François Vandenrijt, Centre Spatial de Liège (Belgium)

  • 8 Optical Tomography

    Yoshio Hayasaki, Utsunomiya University Center for Optical Research & Education (Japan)

  • 9 Quantitative Imaging: Joint Session

    Pascal Picart, Laboratoire d’Acoustique de l’Université du Maine (France)

    Corinne Fournier, Université Jean Monnet Saint-Etienne (France)

© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 11352", Proc. SPIE 11352, Optics and Photonics for Advanced Dimensional Metrology, 1135201 (16 April 2020); https://doi.org/10.1117/12.2571284
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