Precision inspection of micro components free form by Moiré interferometry

S. Meguellati

doi:10.1117/12.2554692

1 April 2020 Precision inspection of micro components free form by Moiré interferometry

S. Meguellati

Proceedings Volume 11352, Optics and Photonics for Advanced Dimensional Metrology; 1135219 (2020) https://doi.org/10.1117/12.2554692
Event: SPIE Photonics Europe, 2020, Online Only

Abstract

The technique proposed in this paper provides a quality control components surface flatness by non-destructive and contactless way, with high resolution and increased sensitivity. The control is done in real time and instantaneously on all inspected surface. The accuracy of components geometry is the one of parameters which influences precision of the function. Moiré inteferometry is full-field optical technique in which the shape of object surfaces is measured by means optical interference generated by optical device. The technique has found various applications in diverse fields, from biomedical to industrial and scientific applications. In many industrial micro metrology applications, non-destructive and non-contact shape measurement is a desirable tool for, quality control and contour mapping. This method of optical scanning presented in this paper is used for precision measurement deformation in shape or absolute forms in comparison with a reference component form, of optical or mechanical components, on surfaces that are of the order of few mm2 and more. The principle of the method is to project the image of the source grating to palpate optically surface to be inspected, after reflection; the image of the source grating is printed by the object topography and is then projected onto the plane of reference grating for generate moiré fringe for defects detection. The optical device allows a significant defect magnification of up to 1000 times the inspected micro defect on micro surfaces, which allows easy processing and achieves an exceptional nanometric imprecision of measurements. According to the measurement principle, the sensitivity for displacement measurement using moiré technique depends on the frequency grating, for increase the detection resolution.

Citation Download Citation

S. Meguellati "Precision inspection of micro components free form by Moiré interferometry", Proc. SPIE 11352, Optics and Photonics for Advanced Dimensional Metrology, 1135219 (1 April 2020); https://doi.org/10.1117/12.2554692

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KEYWORDS

Inspection

Mirrors

Spatial frequencies

Deflectometry

Diffraction gratings

Defect detection

Image quality

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