CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11354 > Article
Presentation + Paper
13 April 2020 Silicon photonic crystal membrane ultrasonic sensor
Michael Zylstra, Brett Poulsen, Jayshri Sabarinathan
Author Affiliations +
Proceedings Volume 11354, Optical Sensing and Detection VI; 113540Y (2020) https://doi.org/10.1117/12.2554176
Event: SPIE Photonics Europe, 2020, Online Only
Abstract
We present a suspended-element silicon photonic crystal membrane sensor with a diaphragm area of 12 μm by 15 μm suitable for free-space ultrasonic acoustic measurements. The sensor is based on the position-dependent directional coupling between neighbouring photonic crystal edges and exhibits compatibility with broadband optical sources, low insertion loss, and more freedom in the mechanical design. By tuning the wavelength such that both time-averaged outputs of the directional coupler were balanced, a differential detection scheme was implemented where common noise sources were suppressed while enhancing the sensor signal without additional photonic components. Using a coiled speaker, the dynamic acoustic response of the sensor from 10 kHz to 80 kHz was measured and we report a peak system response in the difference signal at 40 kHz with a sensitivity of 40 μV/Pa. The compact size and improved mechanical frequency response of these integrated photonic sensors make them suitable for array applications, particularly for the study of fluid dynamics involving high Reynolds number phenomena.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Michael Zylstra, Brett Poulsen, and Jayshri Sabarinathan "Silicon photonic crystal membrane ultrasonic sensor", Proc. SPIE 11354, Optical Sensing and Detection VI, 113540Y (13 April 2020); https://doi.org/10.1117/12.2554176
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 9 PAGES + PRESENTATION
DOWNLOAD PAPER SAVE TO MY LIBRARY
WATCH
PRESENTATION
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors
Acoustics
Photonic crystals
Directional couplers
Ultrasonics
Silicon photonics
Waveguides
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top