Switching of amorphous silicon thin-film actuators for optically functional robotic devices

C. Gillespie; A. Marzo; F. Scarpa; J. Rossiter; A. T. Conn

doi:10.1117/12.2558175

26 April 2020 Switching of amorphous silicon thin-film actuators for optically functional robotic devices

C. Gillespie, A. Marzo, F. Scarpa, J. Rossiter, A. T. Conn

Proceedings Volume 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII; 113751O (2020) https://doi.org/10.1117/12.2558175
Event: SPIE Smart Structures + Nondestructive Evaluation, 2020, Online Only

Abstract

In this paper, we develop and characterise the use of amorphous Silicon as an optically functional material in actuated devices. A novel actuator is developed which uses thin amorphous silicon film deposited on a polyimide substrate using Plasma Enhanced Chemical Vapour Deposition (PECVD). The actuator generates an active stroke via electrostatic attraction which causes the electrodes to “zip” together. The magnitude of displacement is controlled by exploiting the light-dependant resistance of an amorphous silicon (a-Si) photoreceptor integrated onto the actuator. An 8mm long actuator was prototyped and curvature changes were measured using image processing techniques to track the amorphous silicon electrode during actuation. A change of radius of 1mm was found between the ambient (22 Lux) and illuminated states (36 kLux) with an applied voltage of 5 kV.

Conference Presentation

Citation Download Citation

C. Gillespie, A. Marzo, F. Scarpa, J. Rossiter, and A. T. Conn "Switching of amorphous silicon thin-film actuators for optically functional robotic devices", Proc. SPIE 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII, 113751O (26 April 2020); https://doi.org/10.1117/12.2558175

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