Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope

Vladimir P. Tychinsky

doi:10.1117/12.961766

28 September 1989 Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope

Vladimir P. Tychinsky

Proceedings Volume 1139, Optical Storage and Scanning Technology; (1989) https://doi.org/10.1117/12.961766
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Measurements with computer phase microscope show feasibility determination the phase object dimensions and coordinates to an accuracy depending S/N ratio δx = (S/N)^-1d_R where d_R - Rayleigh criterion. The resolution achieved in experiment with semiconductor structures is δx = 0.02 μm. Simple theoretic models of phase objects are discussed.

Citation Download Citation

Vladimir P. Tychinsky "Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope", Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); https://doi.org/10.1117/12.961766

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