Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope

Vladimir P. Tychinsky

doi:10.1117/12.961766

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28 September 1989 Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope

Vladimir P. Tychinsky

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Proceedings Volume 1139, Optical Storage and Scanning Technology; (1989) https://doi.org/10.1117/12.961766
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Measurements with computer phase microscope show feasibility determination the phase object dimensions and coordinates to an accuracy depending S/N ratio δx = (S/N)^-1d_R where d_R - Rayleigh criterion. The resolution achieved in experiment with semiconductor structures is δx = 0.02 μm. Simple theoretic models of phase objects are discussed.

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Vladimir P. Tychinsky "Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope", Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); https://doi.org/10.1117/12.961766