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28 September 1989 Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope
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Proceedings Volume 1139, Optical Storage and Scanning Technology; (1989) https://doi.org/10.1117/12.961766
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France
Abstract
Measurements with computer phase microscope show feasibility determination the phase object dimensions and coordinates to an accuracy depending S/N ratio δx = (S/N)-1dR where dR - Rayleigh criterion. The resolution achieved in experiment with semiconductor structures is δx = 0.02 μm. Simple theoretic models of phase objects are discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir P. Tychinsky "Lateral Superdiffraction Resolution Of Phase Objects By Means Of Computer Microscope", Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); https://doi.org/10.1117/12.961766
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