Stress analysis of Si chip sidewalls using micro-Raman spectroscopy

M. De Biasio; M. Kraft; R. Ong; C. Seifert; M. Ossiander; B. Bernard; M. Roesner

doi:10.1117/12.2557033

24 April 2020 Stress analysis of Si chip sidewalls using micro-Raman spectroscopy

M. De Biasio, M. Kraft, R. Ong, C. Seifert, M. Ossiander, B. Bernard, M. Roesner

Proceedings Volume 11390, Next-Generation Spectroscopic Technologies XIII; 1139015 (2020) https://doi.org/10.1117/12.2557033
Event: SPIE Defense + Commercial Sensing, 2020, Online Only

Abstract

Raman spectroscopy was used to estimate stress in the sidewalls of silicon chips and predict the chips' breaking stress. Silicon wafers were diced using four methods; the breaking stress of the resulting chips was measured mechanically and compared with stress measurements made using Raman spectroscopy. The stress measure- ments made by Raman spectroscopy were loosely correlated with the breaking stress. We conclude that Raman spectroscopy is a promising technique for predicting breaking stress, but requires further development before it can be applied commercially.

Citation Download Citation

M. De Biasio, M. Kraft, R. Ong, C. Seifert, M. Ossiander, B. Bernard, and M. Roesner "Stress analysis of Si chip sidewalls using micro-Raman spectroscopy", Proc. SPIE 11390, Next-Generation Spectroscopic Technologies XIII, 1139015 (24 April 2020); https://doi.org/10.1117/12.2557033

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available