X-Ray Conversion Efficiency In Laser-Produced Plasmas. Application To X-Ray Lithography

I. Toubhans; R Fabbro; J. C. Gauthier; M. Chaker; H. Pepin

doi:10.1117/12.961845

27 November 1989 X-Ray Conversion Efficiency In Laser-Produced Plasmas. Application To X-Ray Lithography

I. Toubhans, R Fabbro, J. C. Gauthier, M. Chaker, H. Pepin

Proceedings Volume 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation; (1989) https://doi.org/10.1117/12.961845
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Laser produced plasmas have shown to be extremely bright sources of soft X-ray emission with many applications in research and industry. They can provide useful X-ray radiation from 0.1 keV to 5 keV. However, the conversion efficiency in a given X-ray energy range depends on the laser and target parameters. Previous studies have shown the influence of target atomic number and laser intensity at 1.06 μm and 0.26 μm on X-ray conversion efficiency. In this paper, we present the evolution of the conversion efficiency as a function of different parameters such as laser wavelength, pulse duration and pulse shape. Experimental results are compared with theoretical calculations obtained with an hydrodynamic code including radiation transport. We have studied separately the X-ray emission-in the subkeV (0.1-0.75 keV) and in the keV (0.75-2 keV) range. For example, the subkeV emission is relevant to X-ray microscopy since it falls within the so-called "water window" which corresponds to wavelengths between the oxygen and carbon K-edges (23-44 Å). For X-ray lithography, keV X-rays are more appropriate than subkeV X-rays since they allow greater transmission through mask substrates. Moreover, they produce less diffraction effect on proximity printing.

Citation Download Citation

I. Toubhans, R Fabbro, J. C. Gauthier, M. Chaker, and H. Pepin "X-Ray Conversion Efficiency In Laser-Produced Plasmas. Application To X-Ray Lithography", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961845

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available