From 5” CdZnTe ingots to high quality (111) CdZnTe substrates for SWIR 2K2 15 µm pitch infrared focal plane arrays manufacturing

J. L. Santailler; E. Gout; T. Journot; M. Parent; A. Pagot; J. Merlin; R. Obrecht; D. Giotta; S. Petit; V. Destefanis; Y. Fourreau; Y. Loreau

doi:10.1117/12.2561377

23 April 2020 From 5” CdZnTe ingots to high quality (111) CdZnTe substrates for SWIR 2K² 15 μm pitch infrared focal plane arrays manufacturing

J. L. Santailler, E. Gout, T. Journot, M. Parent, A. Pagot, J. Merlin, R. Obrecht, D. Giotta, S. Petit, V. Destefanis, Y. Fourreau, Y. Loreau

Author Affiliations +

Proceedings Volume 11407, Infrared Technology and Applications XLVI; 114070G (2020) https://doi.org/10.1117/12.2561377
Event: SPIE Defense + Commercial Sensing, 2020, Online Only

Abstract

Cd_1-yZnyTe single crystal is the current material of choice to be used as substrate for the growth of lattice-matched Hg_1-xCd_xTe epilayers with cutoffs wavelengths in the SWIR range (~2,9 μm (x=0,4) to 2μm (x=0,54)). For the manufacturing of large 2k² IR focal plane arrays with a 15 μm pitch, large diameter Cd_1-yZnyTe ingots with a state-of-the-art material quality are required. Crystal growth method from the melt; like Vertical Gradient Freeze technique; enables us to get close to 5 inches in diameter, high quality single crystals, after decades of developments. As the growth of high-quality Cd_1-yZnyTe single crystal ingots remains a big technological challenge, we present some recent technical achievements in this field, got within the frame of the H2020 ASTEROID project. Some requirements regarding material specification, like Cd1-yZnyTe substrate size, geometrical perfection (TTV, faces parallelism), material quality (crystallinity, dislocations) have imposed many new process updates and developments in our elaboration scheme. State-Of-the-Art 72x73 mm² Cd1-yZnyTe substrates with epiready surface preparations are now available for the Front-End-Of-Line of 2k² IR Focal Plane Array Processing at CEA-LETI / LYNRED (previously named SOFRADIR).

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J. L. Santailler, E. Gout, T. Journot, M. Parent, A. Pagot, J. Merlin, R. Obrecht, D. Giotta, S. Petit, V. Destefanis, Y. Fourreau, and Y. Loreau "From 5” CdZnTe ingots to high quality (111) CdZnTe substrates for SWIR 2K² 15 μm pitch infrared focal plane arrays manufacturing", Proc. SPIE 11407, Infrared Technology and Applications XLVI, 114070G (23 April 2020); https://doi.org/10.1117/12.2561377

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