Paper
6 December 1989 Nanomechano-Grating-Coupler-Modulator And Integrated Optical Microphone
W. Lukosz, P. Pliska
Author Affiliations +
Proceedings Volume 1141, 5th European Conf on Integrated Optics: ECIO '89; (1989) https://doi.org/10.1117/12.961914
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France
Abstract
We demonstrated both a novel integrated optical modulator and a microphone. They are based on an input grating coupler on a planar waveguide. Their working principle is as follows: the incoupled power is modulated by varying the width d of the small air gap between an "effective-refractive-index-shifting element E", i.e., a nonabsorbing dielectric plate, and the waveguide in the coupler region. Since d < A, where 1. is the wavelength, the evanescent field of the guided mode penetrates through the air gap into the element E. Because of this interaction, the Ad variations induce changes in the effective refractive index N of the guided mode, and consequently in the incoupling efficiency. Sufficiently high modulations can be achieved with gap width variations Ad of only a few nanometers which, in turn, are effected by external forces, namely by a piezoelectrically generated force in the case of the modulator, and by sound pressure in the case of the microphone. In our experiments, we used thin monomode Si0,-TiO2 waveguides with embossed surface relief gratings of 1200 or 2442 lines/mm. The effettive-refractive-index-shifting element E was a glass plate. Modulation frequencies of up to 480 kHz were reached.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. Lukosz and P. Pliska "Nanomechano-Grating-Coupler-Modulator And Integrated Optical Microphone", Proc. SPIE 1141, 5th European Conf on Integrated Optics: ECIO '89, (6 December 1989); https://doi.org/10.1117/12.961914
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Cited by 5 scholarly publications.
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KEYWORDS
Waveguides

Refractive index

Modulation

Integrated optics

Modulators

Glasses

Chemical elements

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