The morphology evolution and optical characteristic within longitudinal direction of self-organized nanopatterns induced during Ar+ ion bombardment (IB) with Fe co-deposition on fused silica (SiO2) surfaces are investigated in this work. At the same ion fluence and angle of incidence, simultaneous Fe co-deposition can result in significant terrace morphology effect with increased roughness and horizontal feature size compared to conventional pure IB. Due to the interaction between the pure IB and Fe co-deposition, well-ordered corrugation patterns can be produced on the surface of the fused silica. Such structure can be used to synthesize ordered self-organized metal nanowire arrays on dielectric materials. This method combines nano-patterning of ion bombardment, impurity co-deposition and metal shadow deposition effect, which provides a feasible way to replace traditional continuous nano-processing methods. Due to the excitation of metal plasmon resonance, nanowire arrays exhibit different optical transmission spectral characteristics at different position in the structure region and show optical anisotropy in the longitudinal direction due to linear changes of structure horizontal feature size.
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