Balancing of residual stress in thin film iridium by utilizing chromium as an underlayer

S. Massahi; L. M. Vu; D. D. M. Ferreira; F. E. Christensen; N. Gellert; P. L. Henriksen; S. Svendsen; A. 'S Jegers; M. Collon; B. Landgraf; D. Girou; A. Thete; B. Shortt; I. Ferreira; M. Bavdaz

doi:10.1117/12.2576298

13 December 2020 Balancing of residual stress in thin film iridium by utilizing chromium as an underlayer

S. Massahi, L. M. Vu, D. D. M. Ferreira, F. E. Christensen, N. Gellert, P. L. Henriksen, S. Svendsen, A. 'S Jegers, M. Collon, B. Landgraf, D. Girou, A. Thete, B. Shortt, I. Ferreira, M. Bavdaz

Author Affiliations +

Proceedings Volume 11444, Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray; 114444N (2020) https://doi.org/10.1117/12.2576298
Event: SPIE Astronomical Telescopes + Instrumentation, 2020, Online Only

Conference Poster

Abstract

As part of the thin film development for the Athena X-ray telescope and X-ray optics in general, we investigated the residual stress in iridium and chromium thin films deposited using direct current magnetron sputtering. Residual stresses in thin films can affect the performance and adhesion properties of the fabricated thin film coated X-ray optics. We characterized the thin films using X-ray reflectometry to determine the thin film thicknesses and stylus profilometry to determine the residual film stresses. To counterbalance the compressive stress identified in the iridium thin films, we introduced a chromium thin film layer for which the residual stress is tensile beneath the iridium film. However, chromium thin films are known to exhibit a grainy growth resulting in a high surface roughness which was also observed in this work. In this paper, we evaluated the effect on the iridium surface roughness when introducing a chromium underlayer and discussed the effect on the X-ray optics performance.

Citation Download Citation

S. Massahi, L. M. Vu, D. D. M. Ferreira, F. E. Christensen, N. Gellert, P. L. Henriksen, S. Svendsen, A. 'S Jegers, M. Collon, B. Landgraf, D. Girou, A. Thete, B. Shortt, I. Ferreira, and M. Bavdaz "Balancing of residual stress in thin film iridium by utilizing chromium as an underlayer", Proc. SPIE 11444, Space Telescopes and Instrumentation 2020: Ultraviolet to Gamma Ray, 114444N (13 December 2020); https://doi.org/10.1117/12.2576298

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available