Automated FT-IR Grazing Angle Microscopy - A New Approach To Micro Spatial Chemical Mapping Of Thin Films

Frederick P. Eng

doi:10.1117/12.969474

1 December 1989 Automated FT-IR Grazing Angle Microscopy - A New Approach To Micro Spatial Chemical Mapping Of Thin Films

Frederick P. Eng

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Proceedings Volume 1145, 7th Intl Conf on Fourier Transform Spectroscopy; (1989) https://doi.org/10.1117/12.969474
Event: Seventh International Conference on Fourier and Computerized Infrared Spectroscopy, 1989, Fairfax, VA, United States

Abstract

With the recent emergence of microscopes combined with FT-IR spectrometers, a new approach to micro-analyze polymer/organic materials has evolved. Samples with size and thickness less than 100 micrometers and 5 nm, respectively, can be analyzed. There are basically two types of infrared microscopes - near normal and grazing angle of incidence. The former provides both transmission and reflectance (near normal angle of incidence) sampling modes whereas the latter focuses only on reflectance using a grazing angle of incidence that ranges from 66 to 84 degrees. The grazing angle microscope, which relatively is more sensitive, is a better approach in analyzing or characterizing micro thin films, smears, or spots on reflective surfaces. Automation of the grazing angle microscope expands its capability further to study micro spatial chemical mapping of polymer, organic, and even inorganic thin films on reflective surfaces. The results yield the thickness map of the thin film in a micro-scopic scale that could not possibly or easily be archievedin the past by any analytical technique. Different mapping patterns such as straight lines, squares, rectangles, circles, spirals, sectors, and circular bands can be routinely accomplished using an IBM PC/AT that controls both the FT-IR spectrometer and the motorized X-Y and theta positioning stage of the microscope.

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Frederick P. Eng "Automated FT-IR Grazing Angle Microscopy - A New Approach To Micro Spatial Chemical Mapping Of Thin Films", Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); https://doi.org/10.1117/12.969474

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KEYWORDS

Microscopes

Thin films

Reflectivity

FT-IR spectroscopy

Chemical analysis

Polymers

Spectrometers

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