1 December 1989 The Development Of Fourier Transform Infrared Ellipsometry.
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Proceedings Volume 1145, 7th Intl Conf on Fourier Transform Spectroscopy; (1989) https://doi.org/10.1117/12.969513
Event: Seventh International Conference on Fourier and Computerized Infrared Spectroscopy, 1989, Fairfax, VA, United States
Abstract
The feasibility of spectroscopic ellipsometry in the infrared spectral region has been investigated, and the first experimental results are presented. The actual configuration is based on a commercial Fourier transform spectrometer equipped with an ellipsometric attachment. The attachment is based on the socalled Beattie's ellipsometer and consists essentially of two wire grid polarizers and a mirror system of unit magnification. In order to ensure equal s- and p- components the polarization of the incoming beam is set 45° with respect to the plane of incidence. The measurements of the reflected beam are made at s-, s- + 45° and p- orientations of the analyzer. The system can thus be called a stepping analyzer, Fourier transform ellipsometer. In order to obtain maximum sensitivity the angle of incidence is close to the pseudo Brewster angle of the material to be studied. The complex dielectric function of the sample is obtained from observed data. Measurements are performed on doped and un-doped polymers (PEO, polypyrrole), semiconductors and liquid crystals (MBBA). This novel technique combines both the multiplex advantage of Fourier transform spectroscopy and the phase sensitivity of ellipsometry, and avoids the use of fast rotating components occurring in the conventional RAE mode.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
O. Hunderi, O. Hunderi, J. Bremer, J. Bremer, Kong Fanping, Kong Fanping, } "The Development Of Fourier Transform Infrared Ellipsometry.", Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); doi: 10.1117/12.969513; https://doi.org/10.1117/12.969513
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