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15 January 1989 Cathodoluminescence Imaging And Spectroscopy Of CVD Diamond In A Scanning Electron Microscope
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Abstract
Optically active defects in diamond films grown by the hot-filament chemical vapor deposition method were investigated by cathodoluminescence (CL) imaging and spectroscopy in a scanning electron microscope. A set of films grown on silicon substrates at deposition temperatures (Td) from 600°C to 850° C was studied. The spatial resolution of the CL images was approximately 0.2 to 0.5 μm; CL spectra were measured with wavelength resolution 0.4 nm in the wavelength range 350 to 900 nm.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. H. Robins, L. P. Cook, E. N. Farabaugh, and A. Feldman "Cathodoluminescence Imaging And Spectroscopy Of CVD Diamond In A Scanning Electron Microscope", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962074
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