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15 January 1989 Influence Of Ion Irradiation On The Properties Of Diamond-Like Carbon Films
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Abstract
The influence of argon ion and CO2 laser irradiation on the structure properties of diamond-like carbon films is reported. The structure ratio of sp2/sp3-CH bond in the films increases as the argon ion irradiates while it decreases as the CO2 laser irradiates , which show that the argon ion irradiation is main for breaking the C-H bond while the laser irradiation is a kind of process of thermal annealing.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fangqing Zhang, Yafei Zhang, Zhihao Zheng, and Guanghua Chen "Influence Of Ion Irradiation On The Properties Of Diamond-Like Carbon Films", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962082
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