Investigation On Structure And Physical Properties Of Hydrogenated Amorphous Carbon Films

Guanghua Chen; Yafei Zhang; Deyan He; Fangqing Zhang

doi:10.1117/12.962083

15 January 1989 Investigation On Structure And Physical Properties Of Hydrogenated Amorphous Carbon Films

Guanghua Chen, Yafei Zhang, Deyan He, Fangqing Zhang

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962083
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Hydrogenated amorphous carbon films were prepared by rf glow discharge decomposition of pure methane at various deposition conditions. The structure and properties of the films have been investigated in respect to the growth rate, conductivity, hardness and bonding structure as a function of substrate temperature, rf power and total gas pressure. The bonding structure has been determined by infrared absorption and electron energy loss spectrum measurements. It is found that a diamond-like film with a hardness of 2200 kg/mm² can be deposited under the optimum deposition condition. The properties of the films used as a protective coating has also been investigated.

Citation Download Citation

Guanghua Chen, Yafei Zhang, Deyan He, and Fangqing Zhang "Investigation On Structure And Physical Properties Of Hydrogenated Amorphous Carbon Films", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962083

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