15 January 1989 Investigation On Structure And Physical Properties Of Hydrogenated Amorphous Carbon Films
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Abstract
Hydrogenated amorphous carbon films were prepared by rf glow discharge decomposition of pure methane at various deposition conditions. The structure and properties of the films have been investigated in respect to the growth rate, conductivity, hardness and bonding structure as a function of substrate temperature, rf power and total gas pressure. The bonding structure has been determined by infrared absorption and electron energy loss spectrum measurements. It is found that a diamond-like film with a hardness of 2200 kg/mm2 can be deposited under the optimum deposition condition. The properties of the films used as a protective coating has also been investigated.
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Guanghua Chen, Guanghua Chen, Yafei Zhang, Yafei Zhang, Deyan He, Deyan He, Fangqing Zhang, Fangqing Zhang, } "Investigation On Structure And Physical Properties Of Hydrogenated Amorphous Carbon Films", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); doi: 10.1117/12.962083; https://doi.org/10.1117/12.962083
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