Ultra-Thin Diamond Films For X-Ray Window Applications

Michael G. Peters; James L. Knowles; Mark Breen; Jon McCarthy

doi:10.1117/12.962081

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15 January 1989 Ultra-Thin Diamond Films For X-Ray Window Applications

Michael G. Peters; James L. Knowles; Mark Breen; Jon McCarthy

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Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962081
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Diamond possesses a number of interesting properties that make it an ideal candidate for a variety of x-ray optical applications. Most notable are the high x-ray transmission, exceptional mechanical properties and low diffusion rate of diamond films. One application that has been made possible recently with plasma-enhanced chemical vapor deposition of diamond films is an ultra-thin x-ray detector window for elemental analysis. This paper discusses the advantages of using diamond films for this application and what developments were necessary in order to meet performance specifications. We will also discuss qualification testing of the x-ray window and suggest other areas of application which may benefit from this new technology.

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Michael G. Peters, James L. Knowles, Mark Breen, and Jon McCarthy "Ultra-Thin Diamond Films For X-Ray Window Applications", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962081

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