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20 August 2020 Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces
Otto L. Muskens, Kai Sun, Wei Xiao, C. H. de Groot
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Proceedings Volume 11460, Metamaterials, Metadevices, and Metasystems 2020; 114600M (2020) https://doi.org/10.1117/12.2568755
Event: SPIE Nanoscience + Engineering, 2020, Online Only
Abstract
We have realized a new platform for multiplexing different spectral functionalities in a single meta-surface device using metal oxide plasmonics for infrared applications with very low cross-talk in the UV-Visible. Here we demonstrate the use of oxygen plasma patterning as a technique to selectively and locally modulate the carrier density in planar Al-doped ZnO (AZO) metasurfaces without any resulting surface topography. Using this approach, embedded metal oxide plasmonic metasurfaces are demonstrated for infrared applications with high transparency in the visible spectrum. By combining the embedded planar AZO metasurfaces with gold antenna metasurfaces, we realize a multiband visible-IR metasurface. We also demonstrate its performance as a metasurface optical solar reflector (OSR) for use in thermal control of spacecraft.
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Otto L. Muskens, Kai Sun, Wei Xiao, and C. H. de Groot "Embedded metal oxide plasmonics using local plasma oxidation of AZO for planar metasurfaces", Proc. SPIE 11460, Metamaterials, Metadevices, and Metasystems 2020, 114600M (20 August 2020); https://doi.org/10.1117/12.2568755
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KEYWORDS
Oxidation
Metals
Oxides
Plasma
Plasmonics
Sun
Reflectors
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