Paper
20 August 2020 Optical meta device: design, fabrication, and application
Mu Ku Chen, Yongfeng Wu, Cheng Hung Chu, Ren Jie Lin, Jia-Wern Chen, Yi-Teng Huang, Tzu-Ting Huang, Hsin Yu Kuo, Vin-Cent Su, Shuming Wang, Tao Li, Zhenlin Wang, Shining Zhu, Din Ping Tsai
Author Affiliations +
Abstract
Optical meta-devices using meta-surfaces which composed of artificial nanostructures are able to manipulate the electromagnetic phase and amplitude at will. The great advantages of meta-devices are their new properties, lighter weight, small size, high efficiency, better performance, broadband operation, lower energy consumption, and CMOS compatibility for mass production. Given the demand for photonics, many optical meta-devices for the application and control of incident light are being quickly developed for beam deflection and reflection, polarization control and analysis, holography, second-harmonic generation, laser, tunability, imaging, absorption, focusing of light, multiplex color routing and light-field sensing. The design, fabrication and application of the novel optical meta-devices are reported in this talk.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mu Ku Chen, Yongfeng Wu, Cheng Hung Chu, Ren Jie Lin, Jia-Wern Chen, Yi-Teng Huang, Tzu-Ting Huang, Hsin Yu Kuo, Vin-Cent Su, Shuming Wang, Tao Li, Zhenlin Wang, Shining Zhu, and Din Ping Tsai "Optical meta device: design, fabrication, and application", Proc. SPIE 11460, Metamaterials, Metadevices, and Metasystems 2020, 114600P (20 August 2020); https://doi.org/10.1117/12.2567510
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KEYWORDS
Computer aided design

Nanolithography

Nanostructures

Optical design

Polarization

Scanning electron microscopy

CMOS sensors

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