A library-based approach to super resolution metrology and localization without imaging

Femius Koenderink; R. D. Buijs; T. Wolterink; Nick Schilder; E. Verhagen

doi:10.1117/12.2568088

Translator Disclaimer

22 August 2020 A library-based approach to super resolution metrology and localization without imaging

Femius Koenderink, R. D. Buijs, T. Wolterink, Nick Schilder, E. Verhagen

Author Affiliations +

Proceedings Volume 11462, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XVIII; 1146208 (2020) https://doi.org/10.1117/12.2568088
Event: SPIE Nanoscience + Engineering, 2020, Online Only

Abstract

Obtaining nanoscale spatial information without real-space imaging, but from diffraction patterns, is already a valuable tool in metrology We investigate the potential of metasurfaces for nano-optical sensing and metrology with subwavelength resolution. We aim to exploit complex light scattering from a metasurface, programmable illumination, and retrieval of spatial information of a sample from far-field scattering images. We demonstrate an inversion technique based on singular value decomposition whereby we can retrieve the spatial position of a pointlike light source in a plasmon antenna with lambda/50 resolution just on basis of measured far field radiation patterns. Also, we argue that wavefront-shaping applied to plasmon oligomers enables selective generation of sub-diffractive field patterns that could form an optimal and complete basis for spatially-resolved sensing at the nanoscale. Our endeavours use stochastic optimization to choose wavefronts and plasmonic structures.

Conference Presentation

Citation Download Citation

Femius Koenderink, R. D. Buijs, T. Wolterink, Nick Schilder, and E. Verhagen "A library-based approach to super resolution metrology and localization without imaging", Proc. SPIE 11462, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XVIII, 1146208 (22 August 2020); https://doi.org/10.1117/12.2568088

ACCESS THE FULL ARTICLE