Interferometric measurement with robot kinematics

Simon Killinger; Johannes Liebl; Rolf Rascher

doi:10.1117/12.2568348

20 August 2020 Interferometric measurement with robot kinematics

Simon Killinger, Johannes Liebl, Rolf Rascher

Proceedings Volume 11487, Optical Manufacturing and Testing XIII; 114870I (2020) https://doi.org/10.1117/12.2568348
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

Polishing precision optics is highly depending on the operator. Hence, a good result relies on a skilled optician who controls the process chain. This process chain consists of different manual steps such as loading, cleaning and calibrating different machines. To get more control over the process and to speed up the production we currently build an operator independent polishing cell using a single robot. Therefore, we positioned the robot in the middle of the production cell, which enables the robot to reach and manipulate different tools located around the kinematic. One major issues is the lower positioning accuracy and stiffness of an industrial robot in comparison to standard optic machines. Probably the most challenging step concerning accuracy in precision optics manufacturing is the interferometric measurement. In this paper, we present a method using an ESDI Intellium H2000 interferometer, designed for use in unsteady conditions. The robot positions the surface under test without the use of any additional mechanics to enhance the accuracy. The measurement position was manually teached in and approached several times for a statistically significant evaluation. The results show that the robot is sufficiently accurate and stable to perform interferometric measurements. This is a key element towards a completely operator-independent manufacturing cell for precision optics.

Conference Presentation

Citation Download Citation

Simon Killinger, Johannes Liebl, and Rolf Rascher "Interferometric measurement with robot kinematics", Proc. SPIE 11487, Optical Manufacturing and Testing XIII, 114870I (20 August 2020); https://doi.org/10.1117/12.2568348

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available