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21 August 2020 Improvement on x-ray beam image by plane mirrors and x-ray windows for a modern x-ray beamline aiming at next generation light source
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Abstract
We evaluated the effect on the beam image from an x-ray plane mirror and some kinds of an x-ray window by grating interferometer at wavelength and off-line metrology in order to improve the uniformity of the x-ray. Based on wave optical simulation the figure error of the plane mirror was improved in specific spatial wavelength and the additional polished mirror has been succeeded in reduction of the fluctuation as estimated. In this paper we report the current status and discuss specification of total reflection mirror and x-ray window aiming at x-ray beamline optics in the next generation light source.
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© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasunori Senba, Hirokatsu Yumoto, Takahisa Koyama, Takanori Miura, Hikaru Kishimoto, Yasuhiro Shimizu, Hiroshi Yamazaki, and Haruhiko Ohashi "Improvement on x-ray beam image by plane mirrors and x-ray windows for a modern x-ray beamline aiming at next generation light source", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920J (21 August 2020); https://doi.org/10.1117/12.2570168
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